1200℃ Crucible Movable Tube Furnace

Model：KJ-1200X-S-HPCVD

Description：

KJ-1200X-S-HPCVD is a compact 2" split tube furnace with internal sample traveling system inside the processing tube. This allows the position & temperature control of the sample stage or crucible via touch screen digital controller. It is designed for

Specific Introduction:
KJ-1200X-S-HPCVD is a compact 2" split tube furnace with internal sample traveling system inside the processing tube. This allows the position & temperature control of the sample stage or crucible via touch screen digital controller. It is designed for multi-functional rapid thermal processing, such as hybrid physical-chemical deposition(HPCVD), rapid thermal evaporation (RTE), and as well Horizontal Bridgman Crystal Growth ( HDC) under various atmosphere for new generation crystal research.
Parameters:

Split Tube Furnace	Working temperature: 1100°C continuous and 1200°C Max. 2" quartz tube (50mm O.D x 44mm I.D x 450mm L) with vacuum sealed flanges. Customizable
Temperature Control	PID automatic control via solid state relay with 30 steps programmable Built in Over Temperature and Thermocouple Failure Protection ±1°C accuracy N-type thermal couple Heating zone length: 200mm ( 8") Constant temperature zone: 60 mm (1000 °C )
Vacuum Sealing	2" quick clamp flange with 1/4'' fittings, vacuum gauge as well as needle valve on the right side The right flange is connected to a stainless steel bellow which is stretchable up to 150 mm. Left flange with quick-clamped KF25 vacuum port and 1/4'' barb venting valve Max. Vacuum level: 10E-2 torr by mechanical pump and 10-E5 by turbopump
Internal Traveling Mechanism & PLC Control Pannel	One 1/4" Dia. x 24'' long N-type thermal couple is inserted through the right flange to support a mini-crucible boat in the chamber. A step motor can drive the crucible inside the tube from the heating center to the right end of the furnace, 100 mm max. Touch screen control panel allows travel distance setting and temperature display of crucible position Traveling speed is constant at 180mm/ min. ( variable speed control is available upon request at additional cost ) A 50x20x20mm mini-crucible boat (~20ml) is installed on a thermal couple AIN Sample Holder or Graphite Flat Substrate Holder for the wafer is available upon request, additional customization fee will apply
Max. Heating & Cooling Rate	The max heating and cooling rate can be achieved by moving sample into pre-heated hot zone and move the sample out from hot zone. The typical ramp/cool rate is listed in below
Optional Parts	You may need a right angle valve & bellows to connect a vacuum pump ( click the 1st & 2nd pics to order ) Anti-Corrosive digital Gauge up to 10E-5 torr is optional for CVD application (Pic 3) You may order multi-channel gas delivery system for DVD or CVD operation
Warranty	One year limited warranty with lifetime support (Consumable parts such as tubes and o-rings are not covered by the warranty)